1998 Volume 118 Issue 12 Pages 647-651
A capacitive AFM probe having capacitive structure was fabricated by micromachining techniques. For obtaining a high sensitivity and a low voltage-actuation, the thin micro sensor consists of a single crystalline-silicon with a narrow gap between micro-cantilever and opposite electrode was fabricated. The gap is lμm, the thickness of the cantilever is 0.5μm, and the size is 80×100μm. As a result of evaluation of the performance, the micro-probe showed a sufficient performance for nanometric sensing. The capacitive AFM probe has a both functions for sensing and actuation, because the deflection of the micro-cantilever can be measured from the capacitance, and the micro-cantilever can be electrostatically actuated. By reducing the cantilever size, the operation with a high speed imaging is expected.
IEEJ Transactions on Industry Applications
IEEJ Transactions on Electronics, Information and Systems
IEEJ Transactions on Power and Energy
IEEJ Transactions on Fundamentals and Materials
The Journal of The Institute of Electrical Engineers of Japan
The transactions of the Institute of Electrical Engineers of Japan.C
The transactions of the Institute of Electrical Engineers of Japan.B
The transactions of the Institute of Electrical Engineers of Japan.A
The Journal of the Institute of Electrical Engineers of Japan