抄録
A micro electromechnical element for a novel display device-IDD (Interferometric Display Device)-has been proposed and a plototype device is tested to verify its actuation principle. In the IDD, a Fizeau interferometer is constructed by an SiO2 half mirror and silicon substrate surface. When the mirror gap is controlled by a electrostatic force to adjust the optical path difference between two mirrors, the contrast can be changed by the interference in the Fizeau interferometer. A plototype device with 100μm square mirror is driven by a dc voltage up to 50V, resulting in a circular interferometric fringe movement observed by an optical microscope. Step responses less than 100Hz are also examined by using a laser light source.
