抄録
A microelectrode, with clipping structure for insect neural recording, was designed and fabricated by using a Shape Memory Alloy (SMA) thin film. The SMA thin films (TiNi: Titanium Nickel) are deposited by using RF magnetron sputtering and patterned by HF-HNO3 wet etching. The transformation temperatures of the SMA thin films are measured at 54°C (A*) and 50°C (M*). The SMA microelectrode consists of one clipping structure (720μm × 480μm) and two probes (600μm × 70μm). The desired threedimensional shape is given to the electrode by a bonded wire. The SMA microelectrode can clip a nerve cord tightly, and neural activity from a living insect has been successfully recorded with this SMA microelectrode.
