IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Fabrication of an Inverted Scratch-Drive-Actuator for a Powerful and Precise Conveyance System
Yoshio MITA, Dominique COLLARD, Makoto MITA, Hiroyuki FUJITA
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Keywords: Scratch Drive Actuator (SDA), Arrayed Conveyance System, Microactuator
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1999 Volume 119 Issue 12 Pages 648-649

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Abstract
A Scratch-Drive-Actuator array is fabricated in an inverted way. According to the applied square wave of ±90V from 100Hz to 100kHz, the inverted SDAs successfully conveyed an object placed on it to the designed direction. Since SDA is a microactuator with several ten μN of force and several ten nm of actuation step, the inverted SDA will be a key device of precise, powerful conveyance system over a large area.
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