抄録
Hall elements as mass production magnetic sensors are new application area for thin film technology such as vacuum deposition and MB E. Highly sensitive InSb thin film Hall elements formed by vacuum deposition are often applied as magnetic sensors for DC brushless motors used in electronic equipment. InAs Hall elements developed and produced by MBE have high sensitivity and stability over a wide temperature range and have potential for the present and future applications required by many electronic systems. Here, we review the recent status of application, production and the good characteristics of thin film Hall elements for use as magnetic sensors.
