IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Effects of Pd- and Pt-loading on the Gas-sensing Properties of SnO2 Subjected to Surface Chemical Modification with Diethoxydimethylsilane
Kenji WadaMakoto Egashira
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2000 Volume 120 Issue 10 Pages 458-467

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Abstract
Pd- and Pt-loaded SnO2 sensors were subjected to repeated surface chemical modification with diethoxydimethylsilane (DEMS) to modify the gas-sensing properties of the DEMS-modified SnO2 sensor to H2, CH4 and C3H8 with the noble metal sensitizers. Variations in temperature programmed desorption (TPD) chromatograms of oxygen and water as well as in oxidation activities were also investigated in relation to the mechanism of the modification of the gas-sensing properties. Pt/SnO2 was superior to Pd/SnO2 in the H2 sensing, and the sensitivity to H2 increased with repeated surface modification, accompanied by a mazked increase in the H2 oxidation activity. On the other hand, Pd/SnO2 was superior to Pt/SnO2 in the C3H8 and CH4 sensing, and Pd/SnO2 subjected to three times modification with DEMS exhibited the maximum sensitivity of S=180 to C3H8 at 350°C and S=38 to CH4 at 400°C. Then, the response and recovery rate of the hydrocazbon sensing was satisfactorily fast at 400°C. However, the sensitivity to hydrocarbon decreased with further modification, although the catalytic activity for hydrocarbon oxidation was not so much influenced by the modification, in accordance with the almost unchanged amount of PdO species measured by TPD. The variations in gas-sensing and oxidation properties are discussed in terms of the effects of Pd- and Pt-loading and of the SiO2 component introduced by the surface modification with DEMS.
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