Micromachined Mirror using High Polymer as Moving Structure

Abstract

In this paper, we present a novel micromachined galvano-mirror. In the device, the mirror structure is made of the fluorinated polymer (CYTOP^®) in order to obtain high-speed response (i.e. light-weight mirror structure). The fluorinated polymer has a resistance to the anisotropic etchant, TMAH etc., the fabrication process becomes simple by using this polymer. The coil which makes torque to the mirror is made by electroplating metal, resulting in large cross-sectional area of the coil and enabling high current through the coil. We shows the fabrication process steps, measured mirror flatness and resonance characteristics.