A Study on Tapping Styluses for Surface Profilometry

Abstract

New sensors for surface profilometry-tapping styluses, have been developed. During measurements, they tap surface to reduce scratching force of stylus and enable non-destructive measurements like AFMs. Microvibrators such as a quartz resonator, a micro-fork and a PVDF biomorph are used for the tapping and force sensing. This paper describes the principle of the tapping stylus, measurement characteristics of the three styluses, measurement results and features of the tapping styluses.