IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Sticking Prevention of Resonant Strain Sensors
Kyoichi IkedaTetsuya WatanabeTakashi YoshidaShun-ichi MiyazakiHideo TsukamotoTakahiro Kudoh
Author information
JOURNAL FREE ACCESS

2000 Volume 120 Issue 5 Pages 245-251

Details
Abstract
Sticking is a fundamental phenomenon on micromachined devices or tructures. This paper describes about a practical and successful method of prevention for micromachined resonators from sticking and estimation of its sticking resistance based on experimental data.
Content from these authors
© The Institute of Electrical Engineers of Japan
Previous article Next article
feedback
Top