The bending process of a cantilever with constant bending moment driven by the electro-static force is theoretically investigated. According to this analysis, the cantilever has seven deformation modes and five types of mode transition processes. They are categorized by relationship between bending moment of the cantilever and position of a stop layer which is located between a substrate electrode and the cantilever in order to restrict hysteresis movement and to realize precise movement and high speed driving. As long as the cantilever deformation is small, linear analysis is confirmed to be a good approximation and gives unique solutions.
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