Development of an Anti-Corrosive Integrated Mass Flow Controller

Abstract

The development of an anti-corrosive integrated mass flow controller made by micromachiningis described. Stainless steel (SUS316, SUS316L) was used as a material to prevent corrosion. The mass flow controller consists of a thermal flow sensor and a flow control valve driven by a unimorph actuator. The valve could control the flow rate from 0 to 90 SCCM at 75kPa of N₂ gas when the voltage of the piezoelectricd isk was varied from 75V to -75V.