IEEJ Transactions on Sensors and Micromachines
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
Volume 121, Issue 2
Displaying 1-7 of 7 articles from this issue
  • Kuzuo Sato
    2001 Volume 121 Issue 2 Pages 59-64
    Published: February 01, 2001
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
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  • Yoshinobu Naito, Hidekazu Ikezaki, Akira Taniguchi, Kiyoshi Toko
    2001 Volume 121 Issue 2 Pages 65-69
    Published: February 01, 2001
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
    This paper describes an application of taste sensor for detection of a trace amount of organic substances. This sensor consists of multichannel sensors with lipid membranes which are modeled on living organisms. One of characteristics of this sensor is a global selectivity. We discovered that organic substances have large influences on the adsorption of a plus charged lipid (additive in a solution) to a lipid membrane made by minus charged lipid. Using this method, some of organic substances, such as oil, Trichioroethylene and Di-2-ethylhexylphthalate, could be detected about 100ppb within five minutes. In conclusion, the taste sensor has a possibility for real-time monitoring of water quality using this new methods.
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  • Kazunori Hoshino, Fabrizio Mura, Isao Shimoyama
    2001 Volume 121 Issue 2 Pages 70-76
    Published: February 01, 2001
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
    A micro-sensor that merges sensing and scanning functions on a single-chip has been designed and fabricated, resulting in the successful design of the first integrated scanning retina of its kind. A microfabrication technique has been developed in order to combine a microlens array together with a photo-diode array and an electrostatically driven scanning slit on a single chip. The movement of the electrostatic scanner generates an effect similar to that of "retinal scanning vergence" found in the insects' compound eyes. With the fully integrated silicon scanning retina with a micro mechanical scanner, we propose a new architecture of Retinal Scanning which enhances the resolution of a visual sensor.
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  • Shigeki Tsuchitani, Yoshinori Nakano, Yoshihiro Imagawa, Shigeru Hiron ...
    2001 Volume 121 Issue 2 Pages 77-80
    Published: February 01, 2001
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
    Local surface modifications of a diamond like carbon (DLC) film are carried out by applying voltages to conductive (Au coated) AFM probes in the contact mode. The DLC is deposited on a silicon substrate by ECR sputtering. When DC voltages are applied as the probe is scanned, two types of modifications such as hollows and mounds are formed in negative bias (-3--5V). When negative voltage pulses (-15V) are applied to the probe contacting with a point on the DLC, small pits are formed. Diameters of the pits decreases with decrease of the pulse width in the range from 1000ms to 10ms. The pit formed by the voltage pulse with 10ms width has 20nm diameter.
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  • Kaoru Hirata, Dong-Youn Sim, Masayoshi Esashi
    2001 Volume 121 Issue 2 Pages 81-86
    Published: February 01, 2001
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
    The development of an anti-corrosive integrated mass flow controller made by micromachiningis described. Stainless steel (SUS316, SUS316L) was used as a material to prevent corrosion. The mass flow controller consists of a thermal flow sensor and a flow control valve driven by a unimorph actuator. The valve could control the flow rate from 0 to 90 SCCM at 75kPa of N2 gas when the voltage of the piezoelectricd isk was varied from 75V to -75V.
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  • Shinan Wang, Kentaro Mizuno, Motohiro Fujiyoshi, Hirofumi Funabashi, J ...
    2001 Volume 121 Issue 2 Pages 87-93
    Published: February 01, 2001
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
    A thermal micro pressure sensor suitable for measurement in the range of 7×10-3 to 1×105Pa was realized by forming a titanium (Ti) thin-film resistor on a floating NSG (non-doped silica glass) membrane, with the sensing area being as small as 60μm×60μm. The sensor performance was raised by increasing the gaseous ratio to the total thermal conduction, compensating the effect of ambient-temperature drift, and utilizing an optimized novel constant-bias Wheatstone bridge circuit. The sensor was successfully applied to monitoring the pressure in a sealed minute metal package with a capacity of about 0.5ml.
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  • Abu Bakar Md. ISMAIL, Tatsuo YOSHINOBUI, Hiroshi IWASAKI
    2001 Volume 121 Issue 2 Pages 94-99
    Published: February 01, 2001
    Released on J-STAGE: April 01, 2009
    JOURNAL FREE ACCESS
    A light-addressable potentiometric sensor (LAPS) with Poly-L-Omithine with Laminin (PLOL)-coated SiO2 layer as the only insulating material on the bulk Si in SiO2/Si structure, is investigated as a possible biological interface. Comparing with the conventional structure (Si3N4/SiO2/Si) of the LAPS, much steeper photocurrent response was observed for the PLOL-coated SiO2/Si structure, which shows higher surface potential sensitivity and pH resolution. PLOL-coated SiO2 layer is kept soaked with the electrolyte for ten days and no appreciable change in the surface potential sensitivity was noticed. The pH sensitivity of the sensor was investigated in the pH range of pH4 to pH10, and a nearly Nernstian sensitivity was observed.
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