電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
半導体プロセスで作製するニードル型グルコースバイオセンサー: 新規薄膜銀/塩化銀参照電極とプラズマ重合膜の利用
六車 仁志平塚 淳典小嶋 謙一鈴木 博章池袋 一典軽部 征夫
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2001 年 121 巻 8 号 p. 445-451

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A needle-type glucose sensor was microfabricated aiming for mass production of high-quality disposable biosensors. Integrated detecting electrode patterns including a novel thin-film Ag/AgCl reference electrode were formed on a glass substrate by photolithography. The novel thin-film Ag/AgCl reference electrode could maintain a potential expected as a Ag/AgCl electrode in 1M chloride solution for longer than 60h. A plasma-polymerized film was used as a supporting layer in immobilizing an enzyme (glucose oxidase) on the sensitive area. The film is extremely thin and its adhesion to the substrate is excellent. Because functional groups such as amino groups can easily be incorporated in its highly-crosslinked network structure, immobilization of an enzyme can be performed easily and effectively. The greatest advantage is that the process can enable mass production of high-quality biosensors at a low cost.
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