2011 Volume 50 Issue 5 Pages 463-469
XPS is one of a surface analysis technique. XPS spectra are obtained by irradiating a material with a beam of soft X-rays while simultaneously measuring the kinetic energy and numbers of electrons ejected form several nm of the material surface. The ability to produce chemical state information makes XPS a unique tool. XPS instrument is composed of X-ray source, electron collection lens, electron energy analyzer and detector and it requires ultra high vacuum conditions. In this paper, a principle and characteristics of XPS are commented with application results.
