10-2 Reduction of Distortion of the New Super-HARP Image Sensor - Part2

Abstract

In order to reduce distortion caused by lowering the applied target voltage to adjust the sensitivity on the New Super-HARP Image Snsor, we had already proposed a target structure in which the dark current in its non-scan area is suitably increased. However, the problem with that target structure was that a false signal-shaped square frame along the borderline between the scan area and the non-scan area sppeared. There, we explain how to solve this problem by suitably varying the position of the layer that causes the dark current.