PROCEEDINGS OF THE ITE ANNUAL CONVENTION
Online ISSN : 2424-2292
Print ISSN : 1343-1846
ISSN-L : 1343-1846
2000
Session ID : 10-3
Conference information

10-3 Process-Development of CMOS Image Sensor Overlaid with a HAPR Photoconversion Layer
T. HayashidaT. TajimaM. YamauchiM. KosugiH. OhtakeY. IshiguroT. WatabeK. YamanoY. TakiguchiH. KokubunT. WatanabeM. Abe
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
We studied CMOS image sensor overlaid with a HARP film. On this research, the process of connecting HARP film and CMOS image sensor is essential. Revealing the problems on the Indium(In) micro-bump method with this process, we propose the direct-connecting method and direct-laminating method. Aiming archivement these methods, we launch the wafer planarization technology.
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© 2000 The Institute of Image Information and Television Engineers
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