ITE Technical Report
Online ISSN : 2424-1970
Print ISSN : 1342-6893
ISSN-L : 1342-6893
34.2
Session ID : IDY2010-11
Conference information
BaAl_2S_4:Eu EL Devices Prepared by DC-Reactive-Sputtering
Yasuhiro WATANABENoboru MIURAHironaga MATSUMOTORyotaro NAKANO
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

BaAl_2S_4:Eu thin films were prepared by DC reactive sputtering using Ar; H2S mixture gas. It was found that best condition of flow ratio (H2S/total gas) is 2%. The crystallinity and PL characteristics of BaAl_2S_4:Eu thin films show best under the condition of substrate temperature during the sputtering and annealing temperature are 400℃ and 790℃, respectively. EL devices having double insulating structure were fabricated with these conditions. The maximum luminance was 14.4cd/m2 under the 1kHz sinusoidal voltage. The maximum luminance level increased with insert the buffer layers between the phosphor layer and both insulating layers.

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© 2010 The Institute of Image Information and Television Engineers
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