抄録
Industrial cleanrooms are used for the manufacture of semiconductor chips, liquid crystal panels and the like. The cleanroom requires a clean environment free of airborne fine particles and of molecular contaminants. In the cleanroom, a non-unidirectional flow cleanroom, a unidirectional flow cleanroom and a combined system are used. Fan filter units for removing fine particles are installed on the ceiling of the cleanroom. In order to prevent contaminants from entering the cleanroom, outdoor air handling units are used to remove fine particles and molecular contaminants in outdoor air. Air showers are used to prevent operators from bringing in contaminants. As air cleaning devices that make up the industrial cleanroom, outdoor air handling units, fan filter units, air showers and floor-mounted chemical filter units are introduced. In addition, improved fan filter units for energy saving, resource saving and cost reduction are introduced.
