Abstract
A new cutting device driven by an enlargement mechanism with a PZT drive has been developed to realize positioning the cutting tool from nm to mm. In this study, the mechanical principal of a newly developed enlargement mechanism consisting of fluid chamber, a PZT device, and cutting tool stage is reported. The basic performances of the developed mechanism are also evaluated. This developed device demonstrates that the magnitude of enlargement reaches 4 times of stroke than the original one of the PZT. The dynamic characteristics show DC to 50 Hz which is enough frequency response to realize the non-circle cutting. The non-circle profile is machined by the developed mechanism. The profile accuracy obtained settles in ±1.3μm by the repetitive control method.
