直接実装型有機マイクロディスク上への回折格子作製に向けたナノスクラッチ

抄録

Microdisks, which are a type of micro optical resonator and oscillate in WGM, have numerous degenerate modes. To solve this degeneracy, diffraction gratings are often incorporated as a common technique, and such functional microcavities are usually fabricated by lithography using inorganic materials. On the other hand, direct mounting of microdisks that can be printed fabricated would reduce costs and allow the use of organic materials. In this study, we investigated the procedures and methods for fabricating diffraction gratings on organic microdisks by nano-scratching using AFM.