半導体セラミックにおける抵抗分布の観察
1991 年 99 巻 1155 号 p. 1120-1123
詳細
1991 年 99 巻 1155 号 p. 1120-1123
The distribution of electric resistance in dielectric semiconductive ceramic can be observed using optical microscope and scanning electron microscopes by electrolytic etching in dilute acid. Using this method, insulating layers of BaTiO3 surface semiconductive ceramic capacitor and SrTiO3 boundary layer capacitors can be successfully observed. It is considered that the latter insulating boundary layers are different from Bi diffused layers.
