Preparation of SiC-Si
3N
4 composite fine powders from chlorosilanes, C
2H
4 and NH
3 by R. F. thermal plasma was studied. SiC-Si
3N
4 composite fine powders were prepared by injecting chlorosilanes (SiCl
4, SiHCl
3, SiH
2Cl
2), C
2H
4 and NH
3 to the tail flame of R. F. plasma. When the powder was prepared from SiH
2Cl
2, C
2H
4 and NH
3, the powder composition depended on the C
2H
4 and NH
3 flow rate. When C
2H
4 flow rate was low, the powder contained SiC, Si, Si
3N
4 and amorphous phases. As the C
2H
4 flow rate increased, crystalline SiC, C and amorphous phases were present. The surface area of the powder was from 46.6 to 100m
2/g and the particle size was from 0.02 to 0.2μm. TEM and SAED observation showed that these composite powders contained Si, SiC, Si
3N
4, C and amorphous particles. Si2p XPS spectra of the powder were separated into SiC, Si
3N
4, SiO
2 component. These composite powders were considered to be a mixture of SiC, Si
3N
4, C and amorphous particles. After heat treatment at 1773K for 1h in Ar, amorphous phase disappeared and the crystalline phases in the powder were SiC and Si
3N
4.
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