抄録
The effects of carbon content on the tribological behavior of titanium carbonitride(TiCxN1−x) films have been studied herein. A set of titanium carbonitride(TiCxN1−x) films was prepared by arc ion plating with a pure Ti target and a gas mixture of C2H2/N2 on a steel substrate. High-definition field-emission scanning electron microscopy (FESEM) was used to investigate the microstructure of the films. The chemical composition of the films was analyzed using both electron dispersion spectroscopy (EDS) and X-ray photoelectron spectroscopy (XPS) analysis. The surface roughness and microhardness of the films were measured using α-step profilometer and nanoindenter respectively. The tribology of titanium carbonitride(TiCxN1−x) films was investigated using a ball-on-disc testing method and the wear tracks were observed by low-magnification SEM. The tribological behavior of the films was significantly changed with variation of the C2H2/N2 gas ratio. A very low friction coefficient (0.07) of titanium carbonitride(TiCxN1−x) film was observed when the C2H2:N2 gas ratio was about 3:2.
