抄録
Corrosion of ceramic coating films were investigated in various oxidizing aqueous solutions to apply the coatings to instruments of chemical plants. Factors to affect corrosion resistance were discussed from the viewpoint of dissolved oxygen content and film properties such as film material, crystallinity, chlorine content, element composition, splashed particles and pinhole ratio. The obtained results in this study are summarized as follows:
(1) Corrosion of ceramic films were accelerated with increase of dissolved oxygen content.
(2) Crystallinity and chlorine content of film strongly affected corrosion resistance of plasma CVD coatings.
(3) Crystallinity of film and splashed particles in film strongly affected corrosion resistance of PVD coatings.
