抄録
Cavitation erosion of ceramic coatings made by CVD and PVD was investigated to develop a ceramic coating having better erosion resistance. Evaluation method of cavitation erosion resistance of ceramic coatings was proposed using morphology, plastic flow of substrate under film and film adhesion strength. The obtained results in this study are summarized as follows:
(1) Cavitation erosion of ceramic coatings can be evaluated by morphology, measured hardness and film adhesion strength.
(2) PVD film began to be damaged earlier than plasma CVD film, because erosion damage initiated at splashed particles in the PVD film which would be easy to remove.
