2004 年 39 巻 11 号 p. 541-546
We have developed a defect analysis procedure that combines a magneto-optical (MO) imaging system with scanning ion microscopy (SIM) and transmission electron microscopy (TEM). Low Ic areas of coated conductors were inspected using the MO imaging system. The defective area revealed in the MO image was prepared for cross-sectional SIM specimen using a focused Ga ion beam. The porous YBCO layers were found by SIM observation. Furthermore, defective areas were picked up using micro-sampling and then thinned using a focused Ga ion beam. TEM observation and energy dispersive X-ray spectroscopy indicated that the YBCO layers were composed of Y-rich phases and Ba-Cu-O.