抄録
The YBCO growth rate dependence on flow-direction during the TFA-MOD process was investigated in order to apply the model to long tape processing. As a result, the YBCO growth rate strongly depended on the substrate position from the windward and decreased as distance increased from the windward position along the film-width direction. This suggests the effect of two-dimensional diffusion is not negligible. The use of two-dimensional analysis of the YBCO growth rate for the gas flow-direction during the post-annealing process has been discussed to understand substrate position influence on the growth rate by considering the gas flow rate and mass diffusion in the gas boundary layer and precursor. From the analysis, it was suggested that the YBCO growth rate decreases toward the leeward region with the distribution of both H2O and HF gases, which rise out of the YBCO growth. Consequently, the growth rate estimation from the model was in good agreement with the experimental results.