抄録
Competition for the development of compact superconducting SR equipment that could be installed in semiconductor factories began during the latter half of the 1980s. Thereafter, 5 SR units were developed, 4 in Japan and 1 in England. These units are easy to operate and are in practical use. This paper describes the compact superconducting SR unit which authors have developed. Also this paper summarizes and compares the 5 compact superconducting SR units which have been developed and describes the main parameters of the superconducting magnets used therein.
