抄録
This paper describes the design, fabrication, and evaluation of a dual-purpose component for a micro total analysis system (μTAS). This paper aims to develop a dual-purpose fluid power device achieving two functions, mixing and pumping, with a single structure. By achieving two functions requiring a power source with a single structure, the fluid device can downsize the entire system as a result of high integration. A way to drive fluid is to use ultrasonic vibration of an elastic body, which is used in an ultrasonic motor to drive a solid rotor. In this study, this driving method is applied to drive fluid. That is, fluid is driven by a vibrator arranged as a part of a fluid channel. The vibrator shape is a disk. The vibration modes used are standing vibration of one nodal circle for mixing and traveling vibration of two nodal diameters for pumping. The vibrator is designed by finite element code ANSYS, and is composed of a piezo element (φ20mm × 0.5mm) and a phosphor bronze disk (φ24mm × 0.2mm). A fluid power system using the fabricated vibrator is evaluated for its functions of mixing and pumping. In the case of mixing, the device completely mixed two-layer flow in the measurement area in about 5s. In the case of pumping, the device transports fluid with a flow rate of 150.1μm/s. In addition, the device produces bidirectional and stable flow.
