Transactions of The Japan Institute of Electronics Packaging
Online ISSN : 1884-8028
Print ISSN : 1883-3365
ISSN-L : 1883-3365
Technical Papers
Power Generation Enhancement with Gap Narrowing by Using a Nested Flip-Chip Assembly in a Millimeter-Sized Microelectromechanical-System Electrostatic Vibrational Energy Harvester
Kazuyoshi OnoNorio SatoTomomi SakataShin’ichiro MutohJunichi KodateYoshito JinYasuhiro Sato
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2014 Volume 7 Issue 1 Pages 65-78


This paper describes power generation enhancement in a millimeter-sized slit-and-slider structure in an electrostatic vibrational microelectromechanical-system (MEMS) device for energy harvesting. To increase current generation, we have developed a new method to narrow the gap between movable and fixed electrodes for energy conversion in a limited size. The device is fabricated with a nested flip-chip assembly technique. This method can achieve a micron level gap narrowing of 3.8 μm. The approach greatly increased the power generation to 2.3 nA with a 1 mm2 movable part in a slit-and-slider structure. The structural normalized power generation having the gap of 3.8 μm is 8.83 times larger than the previous one.

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© 2014 The Japan Institute of Electronics Packaging
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