Power Generation Enhancement with Gap Narrowing by Using a Nested Flip-Chip Assembly in a Millimeter-Sized Microelectromechanical-System Electrostatic Vibrational Energy Harvester

Abstract

This paper describes power generation enhancement in a millimeter-sized slit-and-slider structure in an electrostatic vibrational microelectromechanical-system (MEMS) device for energy harvesting. To increase current generation, we have developed a new method to narrow the gap between movable and fixed electrodes for energy conversion in a limited size. The device is fabricated with a nested flip-chip assembly technique. This method can achieve a micron level gap narrowing of 3.8 μm. The approach greatly increased the power generation to 2.3 nA with a 1 mm² movable part in a slit-and-slider structure. The structural normalized power generation having the gap of 3.8 μm is 8.83 times larger than the previous one.