CZ 法育成におけるGd_3Ga_5O_<12>単結晶のねじれ・曲がり現象(<特集>「融液成長における不安定性」)
1994 年 21 巻 2 号 p. 144-151
詳細
1994 年 21 巻 2 号 p. 144-151
This review describes causes of the twisting formation of Gd_3Ga_5O_<12> single crystal during growth in Czochralski method. The force of the natural convection is one of important factors for the twisting formation. We examined the degree of natural convection by changing the positions of an RF coil and constructions of ceramic insulations supporting a crucible. Under the conditions which twisting crystals were obtained, we observed 6℃ of cyclic temperature variation at 30-minute intervals in the melt and anomalous flow patterns on the melt surface. We concluded that unstable melt convection caused asymmetric temperature distribution in the melt.
