日本結晶成長学会誌
Online ISSN : 2187-8366
Print ISSN : 0385-6275
ISSN-L : 0385-6275
PZT薄膜の形成に及ぼすPbTiO_3シード層の効果 : 気相成長I
石川 賢司符 徳勝山田 志朗鈴木 久男
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1998 年 25 巻 3 号 p. A19-

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Ferroelectric PZT films were deposited by a sol-gel process on a seeding layer of PbTiO_3 which was prepared by a pulsed laser deposition. Highly c-axis oriented PZT films were obtained when the seeding layer was deposited on the substrate at room temperature. Results were explained by terms of "two step growth".
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© 1998 日本結晶成長学会
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