1999 年 26 巻 2 号 p. 45-
We study the growth law of step bunches induced by the drift of adatoms with evaporation taken into account. We use the step now model and carry out numerical integration of the step velocity. When the drift velocity is large, the average terrace size grows as t^β with βap1/2 similary to the case without evaporation. When the drift velocity is small, the average terrace size grows with βsmaller than 1/2 in the initial stage and saturates in a late stage.