Realization of crystalline BaSi₂ thin films by vacuum evaporation on (111)-oriented Si layers fabricated by aluminum induced crystallization

抄録

We have realized single phase crystalline BaSi₂ thin films on quartz substrate by vacuum evaporation for solar cell applications. This structure is achieved by introducing (111)-oriented poly-Si fabricated by aluminum induced crystallization as a supply layer prior to BaSi₂ deposition. Raman measurements showed five characteristic peaks corresponding to [Si₄]⁴⁻ anions vibrations in BaSi₂ for all films deposited at 400 °C and above. X-ray diffraction analysis showed that randomly-oriented orthorhombic phase of BaSi₂ is achieved with no trace of secondary phases. Also, the crystal quality is enhanced at higher substrate temperatures.