マイクロ軸流ポンプ製作に関する研究

—マイクロインデューサの超精密5軸制御加工—

抄録

The study deals with the development of micro axial-flow pump by means of 5-axis control ultraprecision machining technology. The demand for producing 3-D micro parts is clearly growing year by year. A micro pump for an implantable blood pump is a typical example of important micro mechanical system applicable to bio-related fields. 5-axis control ultraprecision machining technology is suitable for machining such a complicated shape. In the study, a micro inducer is treated as a target shape. Our own 3-D CAD/CAM system for 5-axis control machining is developed in order to manufacture micro inducers, considering the setting error of cutting tool, which is extremely difficult to remove and affects the machining accuracy. In the cutting experiment with the 5-axis control ultraprecision machining center and the diamond ball end mill of 0.2 mm in radius, the micro axial-flow pump is successfully created, whose material is oxgen-free copper. The result of performance test shows that the created inducer functions as a micro axial-flow pump.