ナノシートのAFMプローブによる機械的微細除去加工

—ナノ除去加工における高精度化—

抄録

This paper describes that nano-scale phenomena in the mechanical removal processing of the nano-sheet by using Atomic Force Microscope (AFM) is clarified and the processing experiment of the nano-sheet using the phenomena is tried. Potassium niobates (K₄Nb₆O₁₇·3H₂O) layerd structures with thickness of 2nm is used as nano-sheet in this study. The processing characteristic at the time of nano-sheet processing is investigated, and the following things becomes clear. Processing becomes easier by weakening united force between nano-sheet surfaces reduces the processing easier, and the control to the thickness direction in 2nm unit is possible by load change. Moreover, the remove phenomena of nano-sheet with thickness of several nm is thought that the brittle-like because of the characteristic of crystal structure. In addition, anisotropy in the direction of 90° existed on the surface of the nano-sheet turns out from the calculation and it is clarified that there is a huge influence in making to high accuracy of the shape and size when processing the nano-sheet. By these processing characteristics of nano-seats, the example of 2.5 dimension processing controlled in each 2nm in direction of depth and straight line groove processing of about 33nm in width can be obtained using these characteristics of nano-sheet. Thus, some kinds of a high precision removal processing is found to be able to achieved.