精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
論文
長尺工具マイクロエッジ半径の高精度高速計測システムの開発
元木 健順高 偉古川 勝清野 慧
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2007 年 73 巻 7 号 p. 823-827

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抄録
This paper describes a measurement system for the edge radius of a long precision tool. A line-CCD camera is employed to scan the tool edge over the entire tool length. The edge width of the tool at each scanning point is first evaluated from the image of the line-CCD camera. The edge radius is then calculated from the edge width based on the calibration results using pin gauges. A multi-line scanning method is proposed to reduce the defocus errors caused by the out-of-straightness error of the scanning stage. Experimental results have shown that the edge radii over the entire length of a 5100 mm long tool can be evaluated in 30 minutes.
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© 2007 公益社団法人 精密工学会
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