This paper describes creating a micro fluidic device into a fluoro resin using an excimer laser process. A deformation of blood cell into an artificial capillary-vessel can be observed by using this device. Machining conditions to a fluoro resin by excimer laser ablation were examined. Through holes as the artificial capillary-vessels are made in the fluoro resin having the minimum diameter of 5 μm and the length of 100 μm by laser ablation. And micro-channels are fabricated on the periphery of the holes by laser ablation. A number of resin-films are piled up on a glass. In the case of having multiple layers, adhere more resin laminate films and form the channel space by laser processing. We experimented on running blood into the channels and observed blood cells behavior.
