超精密歯車測定装置の基本軸構成について

抄録

This paper presents the Ultra Precise Gear Measuring Instrument/UPGMI, which can measure individual deviations of the gear with sub-micron meter resolution. Highly stabilized measurements of the ultra precise and very fine/minute gears are indispensable in order to miniaturize machine and its components. To meet with these purposes, a new basic concept of the main spindle of rotational axis, carrying test gear, with vertical travel/motion was employed in UPGMI. The result of theoretical study for the error factors caused from the basic axis formation shows the UPGMI construction has less error factors compared with the current typical measuring instruments. Then calculation for error allowance distribution to each mechanism for axis movement was made. We could achieved the accuracy of measurement in submicron order even at preliminary assembled UPGMI.