精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
論文
2波長ワンショット干渉計測
北川 克一杉山 将松坂 拓哉小川 英光鈴木 一嘉
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75 巻 (2009) 2 号 p. 273-277

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A new surface profiling technique is proposed, which enables us to measure a surface profile without losing high frequency components of sharp edges and with extended phase measurement range. It is accomplished by a newly developed two-wavelength imaging system and the local model fitting (LMF) algorithm for carrier fringe pattern analysis. The experimental results demonstrated that the proposed method can measure steep steps fast and accurately with an extended measurement range, while the robustness against vibration in the conventional single-shot methods is maintained.

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© 2009 公益社団法人 精密工学会
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