抄録
This paper describes a fast tool control (FTC) system integrated with a piezoelectric force sensor, namely FS-FTC system, which is designed for in-process measurement of cutting force during the fabrication of micro-lens array. It is confirmed that the FS-FTC unit has a stiffness of 62.2 N/μm. Micro-lens arrays are fabricated on two Ni-P plating roll workpieces with different degrees of hardness by using the FS-FTC system. Each of the micro-lenses has a length of 200 μm and a depth of 5.2 μm. The amplitudes of thrust forces measured during the cutting process by the FS-FTC system are 2.12 N and 0.94 N for the hard and the soft Ni-P plating roll workpieces, respectively.
