3D-MEMS光スイッチモジュールの開発

—自動特性評価系の構築と試作モジュールの動作検証—

抄録

We have developed an automatic measurement system for the efficient evaluation of the switching characteristics of optical MEMS switch modules. In an experimental evaluation of a prototype optical switch module, the insertion loss and the switching time of all optical paths can be measured in the time 1/10 or less compared with the conventional measurement. Moreover, we demonstrated that dynamic optical characteristics, such as electrical and mechanical interferences, can be evaluated automatically. We also confirmed that a practical 3-D MEMS optical switch module can be constructed.