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精密工学会誌
Vol. 78 (2012) No. 7 p. 636-640

記事言語:

http://doi.org/10.2493/jjspe.78.636

論文

In this paper we discuss the influence of Na2SO4 EO water (electrolyzed oxidizing water) on the surface of oxygen-free copper. First, we threw light on the etching efficiency of Na2SO4 EO water on the surface of oxygen-free copper by comparing it with the etching efficiency of soaking in NaCl EO water or chemicals. The comparative study showed that as for the etching efficiency on oxygen-free copper, Na2SO4 EO water was superior to chemicals, while inferior to NaCl EO water. Next, we threw light on the influence of Na2SO4 EO water on the surface shape of oxygen-free copper by the SEM observations and AFM measurement. As the result, the effect of Na2SO4 EO water on oxygen-free copper, which made its surface coarse, turned out weaker than that of NaCl EO water. Lastly, by analyzing the surface, we made it clear that Na2SO4 EO water did not form foreign substances such as copper chloride which was formed when using NaCl EO water. Unlike NaCl EO water, Na2SO4 EO water can be utilized widely for surface washing or surface treatment of precision machine.

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