3D-MEMS光スイッチモジュールの開発

—耐環境基本特性の検証—

抄録

For practical application, 3D-MEMS optical switch modules should be a mechanical-vibration-proof and have good temperature characteristics and good electromagnetic compatibility (EMC). To satisfy these fundamental environmental characteristics of optical switch modules, we examine a design technique of vibration-proof mechanism, a structure of fixing mechanism for optical I/O device and a module structure considered for EMC performances. We evaluated the fundamental environmental characteristics of a prototype optical switch module. In results, we confirmed that the switching module satisfies the Telcordia GR-63 office vibration test due to application of vibration-proof mechanism. The structure of fixing mechanism for optical I/O devices enabled the reduction of error in optical axis alignment. We also show that the CISPR 22 and CISPR24 are satisfied for EMC performance in this prototype. The evaluation results confirm that the 3D MEMS optical switch module is suitable for practical use.