精密工学会誌
Online ISSN : 1882-675X
Print ISSN : 0912-0289
ISSN-L : 0912-0289
論文
参照平板の横シフトおよび逐次二点法を用いた真直度輪郭測定
伊藤 直幸外川 一仁柳 和久清野 慧田中 秀岳
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2014 年 80 巻 1 号 p. 75-80

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This paper deals with invention of a new measurement principle for straightness profile measuring instrument based on numerical software datum. The novel sequential two-point method was realized using a twin heads displacement sensor and a shifting reference plate in the lateral direction. Utilizing a precise level meter for correction of the reference plate slope, a long distance straightness profile can be measured in an extrapolative way. Uncertainty analysis on designed specifications of the measuring instrument assured its high accuracy and practicality. The experimental variation of straightness profiles measured by a developed measurement system was in a good agreement with the numerical simulation.
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