ナノメータ加工のための高精度工具位置出し技術の開発 (第1報)

—基礎実験—

抄録

Nano-machining requires precise positioning of a tool on a work piece when the tool is exchanged during the machining. But the usual positioning accuracy is 1μm or less. In this report we propose a method to detect the relative position of a tool and a work piece by 10 nm order repeatability. For this positioning, low voltage is supplied between the tool and the work piece, and the contact position of the tool and the work piece is detected from the current variation between them. The voltage and the current is restricted at the level of Scanning Tunneling Microscope (STM). This method has a possibility that the positioning process is done without contact of them, because the detected current is the tunnel current. Experimental results by the fundamental test show that the repeatability of positioning is less than 20nm.