抄録
Nano-machining requires precise positioning of a tool on a workpiece when the start of machining or the tool is exchanged during the machining. In the 1st report we obtained the positioning repeatability of 20nm by supplying voltage between the tool and the workpiece and detecting current variation between them using the restricted voltage and current at the level of Scanning Tunneling Microscope (STM). In this report, the effects of factors affecting on the positioning repeatability is discussed and the positioning repeatability of 5nm is obtained by using a improved detecting circuit. Additionally it is confirmed that this is non-contact positioning system, where the tool and the workpiece does not contact during the positioning.
