磁気ディスク基板用加工装置の運動解析

遊離砥粒による平行平面加工 (第2報)

抄録

Kinematical analysis on lapping a ring shaped plate with a circular tool is carried out and numerical equations on stock removal are obtained, taking into account distributed pressure due to the moment of inertia of the area contacted for both work and tool and due to the eccentric load. A newly designed machine, in which distributed presssure is able to be adjusted with eccentric load due to tool weight, was also built. Experimental stock removal, flatness and parallelism values on 360 mm diameter - 2 mm thick aluminum plates for magnetic memory disk, made by the machine, are in agreement with calculated values. In consequence. procedure deducing the equations is found to be satisfactory. The machine obtained here are not only applied to lapping, but are capable of being applied to mirror-polish the surfaces, plated electroless deposited nickel on an aluminum disk.