表面おうとつの三次元評価のための一測定決

抄録

The three-dimensional measuring system was developed and its performance was tested as the first stage to evaluate the three-dimensional characteristics of surface asperities. The measuring device was designed and manufactured to obtain the discrete data of asperity heights sampled at nodes of matrix on a surface. The present system consists of the profilometer of tracer type, the precision table which moves perpendicular to tracing direction of stylus, and the controller which drives the devices automatically. Ground surface (σ=0.4μm) and lapped one (σ=1.1μm) were measured and shown by the perspective pictures and the contour maps. The three-dimensional characteristics of these surfaces can usefully be evaluated by using the present system.