This paper introduces a design procedure of precise linear feed mechanism by an application of friction drive. The principle of this mechanism is that the rotational motion of drive shaft is converted into the linear motion of driven bar by the traction force at their contact point. This procedure consists of two parts of accuracy and strength analysis. Namely, the effect of drive shaft geometry and its motion on the positioning accuracy is analyzed first. Secondly the critical contact force, which is constrained by the yielding of member's material, is analyzed by the help of Hertzian contact theory. These analyses are summarized in the form of design parameter. Two prototypes with a line contact or a point contact, where the members were supported either by anti-friction rollers or aerostatic bearings, were made and tested, showing the results of up to 0.025 μm step feed.